Wafer ID(OCR) marking equipment: SIM120
advantages introduction
Equipped with laser power automatic compensation function
Can be used for Wafer ID(OCR) marking.
Marking font : OCR / B412 / SEMIT7 / engraving mode
Equipped with FOUP opener/robot/pre-aligner/FFU/marking head & particle suction units
Equipped with automatic scanner calibration and automatic offset compensation.
General spot size is about 90um.
Parameter configuration
Function Description
Applicable products: 8-inch, 12 inch silicon wafers.Main function: To achieve laser marking for wafer OCR.
Import and export method: FOUP to FOUP
Size: L2100 * W1400 * H1800mm
