晶圆ID打标设备：SIM120
优点介绍
可用于晶圆ID(OCR)打标
打标字体：OCR/B412/SEMIT7/雕刻模式
配备FOUP/机械手/预对准器/FFU/打标头&集尘模块
配备自动振镜校正功能和自动偏移补偿功能
一般光斑大小是90um
Equipped with laser power automatic compensation function
Can be used for Wafer ID(OCR) marking.
Marking font : OCR / B412 / SEMIT7 / engraving mode
Equipped with FOUP opener/robot/pre-aligner/FFU/marking head & particle suction units
Equipped with automatic scanner calibration and automatic offset compensation.
General spot size is about 90um.
参数配置
功能描述
- 适用产品：8英寸、12英寸 硅晶圆
- 主要功能：实现晶圆OCR激光打标
- 进出料方式：FOUP 到 FOUP
- 尺寸：L2100 * W1400 * H1800mm
- Applicable products: 8-inch, 12 inch silicon wafers.
- Main function: To achieve laser marking for wafer OCR.
- Import and export method: FOUP to FOUP
- Size: L2100 * W1400 * H1800mm
